• Chemistry - Materials
  • Complex systems and software engineering

Spectrométrie de Masse d'Ions Secondaires (SIMS)

Technological platform


The GEMaC is equipped with a recent ion analyser (IMS7f CAMECA). This equipment allows the analysis of solid materials, which can be placed in a high vacuum, using the Secondary Ion Mass Spectrometry (SIMS) technique. The IMS7f is mainly intended for the determination of the concentration of dopants and their distributions, the control of residual impurities, the quality of interfaces in (high-tech) semiconductor materials.


  • Mrs Marie-Amandine PINAULT
  • Mr François JOMARD

Innovation themes

Lab of attachment

Map and access

45, avenue des Etats-Unis
UVSQ, campus des Sciences, Bâtiment Fermat

Formations offers

Offres de formations