Our platform is equipped with a wide range of equipment dedicated to the fabrication, shaping and characterisation of thin films. For example, we have a scanning electron microscope equipped with an energy spectrometer for chemical microanalysis, and an electron lithography system for nanostructuring thin films. We also have thin film deposition frames, a direct write photolithography machine (without physical mask). Our platform also offers a wide range of equipment dedicated to microtechnologies: plasma cleaning, profilometry, micro-welding, sub-tip measurements.
Lab of attachment
1, rue Nicolas Appert
LPS, campus universitaire d'Orsay, Bâtiment 510