• Chemistry - Materials
  • Complex systems and software engineering

Micro et nanotechnologies : lithographies, couches minces, caractérisations

Technological platform


Our platform is equipped with a wide range of equipment dedicated to the fabrication, shaping and characterisation of thin films. For example, we have a scanning electron microscope equipped with an energy spectrometer for chemical microanalysis, and an electron lithography system for nanostructuring thin films. We also have thin film deposition frames, a direct write photolithography machine (without physical mask). Our platform also offers a wide range of equipment dedicated to microtechnologies: plasma cleaning, profilometry, micro-welding, sub-tip measurements.


  • Mr Raphael WEIL

Innovation themes

Lab of attachment

Map and access

1, rue Nicolas Appert
LPS, campus universitaire d'Orsay, Bâtiment 510
91400 ORSAY

Formations offers

Offres de formations