The Thin Films for X-ray Optics (CeMOX) platform is a platform of the Light-Matter Federation (LUMAT).
CeMOX includes 2 magnetron sputtering machines for the elaboration of multilayer X-ray and Extreme UV optics as well as a grazing X-ray reflectometer to characterize these stacks of nanometric thin films.
Lab of attachment
2, avenue Augustin Fresnel
LCF / Institut d'Optique Graduate School