• Complex systems and software engineering

CeMOX - Couches Minces pour l'Optique X

Technological platform

Description

The Thin Films for X-ray Optics (CeMOX) platform is a platform of the Light-Matter Federation (LUMAT).

CeMOX includes 2 magnetron sputtering machines for the elaboration of multilayer X-ray and Extreme UV optics as well as a grazing X-ray reflectometer to characterize these stacks of nanometric thin films.

Contacts

  • Mr Franck DELMOTTE
  • Mr Evgueni MELTCHAKOV

http://www.cemox.u-psud.fr/

Innovation themes

Lab of attachment

Map and access

2, avenue Augustin Fresnel
LCF / Institut d'Optique Graduate School
91120 PALAISEAU

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Thematics

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  • Complex systems and software engineering
    • Photonics - optical materials, application nanotechnology
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Type

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Technological platform
Description

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The Thin Films for X-ray Optics (CeMOX) platform is a platform of the Light-Matter Federation (LUMAT). CeMOX includes 2 magnetron sputtering machines for the elaboration of multilayer X-ray and Extreme UV optics as well as a grazing X-ray reflectometer to characterize these stacks of nanometric thin films.
Contact informations
Contact

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Contact name Email phone number
Franck-DELMOTTE franck.delmotte@institutoptique.fr
Evgueni-MELTCHAKOV evgueni.meltchakov@institutoptique.fr
URL

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http://www.cemox.u-psud.fr/

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2, avenue Augustin Fresnel
LCF / Institut d'Optique Graduate School
91120 PALAISEAU
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Technologies and equipments
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http://www.cemox.u-psud.fr/Tools.html
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