• Complex systems and software engineering

CeMOX - Couches Minces pour l'Optique X

Technological platform


The Thin Films for X-ray Optics (CeMOX) platform is a platform of the Light-Matter Federation (LUMAT).

CeMOX includes 2 magnetron sputtering machines for the elaboration of multilayer X-ray and Extreme UV optics as well as a grazing X-ray reflectometer to characterize these stacks of nanometric thin films.


  • Mr Franck DELMOTTE
  • Mr Evgueni MELTCHAKOV

Innovation themes

Lab of attachment

Map and access

2, avenue Augustin Fresnel
LCF / Institut d'Optique Graduate School

Formations offers

Offres de formations